Wafer Inspection

Film Thickness
Metrology

Bio-Chip
Manufacturing

Integrated Circuit
Manufacturing

Flip Chip
Inspection

BGA Inspection

Disk Media Profiling

Bio-Chip &FT-IR
Spectroscopy

Low Vibration

No External Cable Track Required

High Throughput
(3X Precision Lead- Screw Performance)

High Reliability
(Fewer Points of Wear)

Best Price / Performance Ratio

Linear Motor Performance
at Lead-Screw Prices

Standard Features

Low Noise Recirculating
Ball Bearings

Non-Contact Encoder

Brushless Three-Phase
Linear Motors

Complete Internal Cable Management System

Integral Limit Switches

Reference Mark at
Center of Travel

8",12",18",24",36"
0.1 µm 0.2 µm 0.5 µm 1 µm
0.3"at each end

Straightness
8"full travel:
12"full travel:
18"full travel:
24"full travel:
36"full travel:

Flatness
8"full travel:
12"full travel
18"full travel:
24"full travel:
36"full travel:

Accuracy
8"full travel:
12"full travel:
18"full travel:
24"full travel:
36"full travel:

Repeatability
1 µ encoder:
0.5 µ encoder
0.2 µ encoder:
0.1 µ encoder:

Vibration (vertical)
At 25mm/sec:
At 100mm/sec:

±2 microns per inch
±3 microns
±4 microns
±6 microns
±8 microns

±2 microns per inch
:±3 microns
±4 microns
±6 microns
±8 microns

±3 microns (at 25 °C)
±5 microns (at 25 °C)
±6 microns (at 25 °C)
±8 microns (at 25 °C)
±12 microns (at 25 °C)

±1.5 microns
:±0.75 microns
±0.3 microns
±0.2 microns

<15nm RMS
<25nm RMS